Thin Film Photovoltaics on Wafers

Inline systems are ideal for such consistent production tasks with a high rate of throughput. FHR.Line.1100-V is a vertical inline system in which the substrates for coating are moved in an upright position past highly productive tube sputtering sources that are also oriented in an upright position. The individual substrates are provided in boxes, removed by a placement robot programmed by FHR and placed in large carriers (substrate holders). The inclination of the system by 7° to the vertical ensures that the substrates remain in the carrier. With a cycle time of < 8 minutes, the carriers pass through the system, where they are brought into the vacuum in several airlocks separated by valves, tempered, coated and released back into the atmosphere via an airlock. A carrier return system brings the carriers back to the assembly cell, where a second robot removes the substrates and places them back into transport boxes. The carrier is then reloaded by the second robot and used again. stem, where they are brought into a vacuum in several airlocks separated by valves, tempered, coated and released back into the atmosphere via an airlock. A carrier return system brings the carriers back to the placement cell, where a second robot removes the substrates and places them back into transport boxes. The carrier is then reloaded by the second robot and used again.

1. Use in a 24/7 production line
2. Carrier transport – including return completely automated
3. Automatic loading and unloading with FHR’s own control system
4. Highest material utilization and longest target service life through the use of tubular cathodes